The model CIBD-100 is an electrostatic, double-focusing 90° ion beam deflector consisting of concentric cylindrical plates of differing heights*. In contrast to standard cylindrical deflectors, the CIBD-100 design allows for focusing of an incoming parallel beam not only in the plane of deflection but also in the orthogonal direction. The optical properties of our design resemble those of a spherical capacitor deflector while it is much easier and more cost effective to manufacture. Compared to our Model QID-900, the voltages required to deflect the ion beam are reduced by roughly 75%. In other words, the voltages normally required to deflect an ion beam at 90 degrees with a quadrupole ion deflector like the QID-900 are equal to plus and minus the ion beam accelerating potential for singly charged beams. When using the model CIBD-100, the voltages required are approximately plus and minus 1/4 the accelerating potential. The deflector can also be turned off and the ion beam can pass straight through the assembly via an aperture in one of the curved deflection plates.
The standard model CIBD-100 is mounted in a standard 8″ conflat Tee vacuum chamber (Model CIBD-100-H).
* H. Kreckel et al., Rev. Sci. Instrum. 81, 063304 2010.
PATENTED: US 8,309,936 B2, November 13, 2012.
Materials used in construction:
- Aluminum, stainless steel, Polyether ether ketone (PEEK), and ceramic
Beam energy Range:
- Standard Operation, 1eV to 40 keV
Maximum Bakeout Temperature:
- 250° C
Power Supply Requirement:
- Deflection Plates: Two power supplies, 0 to + 10kV and 0 to – 10kV
- Two high voltage feedthroughs SHV-10 (10kV rating).