Ion Gun System

Beam Imaging Solutions (BIS) has two Ion Gun system types to offer. Each Gun includes an ion source assembly, heat sink, acceleration and focusing system, vertical deflection plates, a 6″ long velocity filter and a velocity filter guard ring control unit. Components are assembled in a vacuum housing fitted with a flange for mounting onto the customer’s equipment. The guard ring control unit can be mounted into a standard 19″ rack panel. Custom flanges and additional ports may be ordered if needed.

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Product Overview

Beam Imaging Solutions (BIS) has two Ion Gun system types to offer. Each Gun includes an ion source assembly, heat sink, acceleration and focusing system, vertical deflection plates, a 6″ long velocity filter and a velocity filter guard ring control unit. Components are assembled in a vacuum housing fitted with a flange for mounting onto the customer’s equipment. The guard ring control unit can be mounted into a standard 19″ rack panel. Custom flanges and additional ports may be ordered if needed. When a beam decelerator is required with the gun, an adapter flange is included (model G-1-D and G-2-D Ion Guns). Beam Imaging also offers control units (E-series) for the above Ion Gun Systems. The control units include all power supplies needed to operate the Ion Gun as well as a cooling unit for the ion source and vacuum gauge controls. All Ion Beam Components are also available separately or in complete sets (ion source, heat sink, velocity filter, extraction and focus lens system). These complete sets are referred to as an Ion Beam Kit.

Ion Guns Model G-1 and G-1-D (non-bakeable)

The model G-1 can be operated in an energy range of 500 eV to 10 keV (with optional 20keV). If an ion beam energy less than 500 eV is required, we recommend using the model G-1-D, which includes the model 400 or model 450 decelerator and can produce mass selected ion beams with energies as low as 1 eV. The vacuum housing of the model G-1 series is made of a polished stainless steel tube, 6″ in diameter and approximately 19″ long. The length includes the model 500 insulator-mounting flange. The total length of the G-1-D is 23 1/8″ when used with the model 400 or model 450 decelerator. Both Ion Gun housings are supplied with a 6″ ID roughing port. The standard exit flange on the models G-1 and G-1-D are an 8″ OD and 6″ ID conflat flange. The model G-1-D, however, has a 2 3/4″ exit flange when used with the decelerator (model 400 only). Both the model G-1 and G-1-D are good for vacuum use to 10-7 Torr and are not designed for bakeout.

Ion Guns Model G-2 and G-2-D (bakeable)

The G-2 and G-2-D Ion Guns are both designed to operate in the 500 eV to 10 keV (with optional 20keV) energy range. The G-2-D Ion Gun however, which has the optional model 400 or model 450 decelerator, can be used down to 1 eV. There are two differences between the G-1 and G-2 series Ion Guns. The G-2 Ion Guns are designed to be bakeable to 200o C, for use with ultra-high vacuum (UHV) systems. The magnet coils on the velocity filter are encapsulated in a stainless steel jacket and are liquid cooled, thus allowing for higher currents and magnetic field strength. BIS recommends the CU-1 cooling unit for magnet and ion source cooling. The dimensions of the G-2 and G-2-D are the same as the G-1 and G-1-D respectively. Both the G-2 and G-2-D are designed to be good for a vacuum use to 10-9 Torr.

Technical Information

Resolution

M/D M ~ 400

Ion Current

Up to 20 micro-amp focussed, 100 micro-amp unfocussed

Ion Source (DC)

Filament 16 V – 20 A, Anode 0 – 150 V, 0.4 A

Ion Source (RF)

0-500Watts at 13.56 MhZ

Lens System

0 – 10 kV, 1 mA Acceleration Voltage, 0 – 10 kV, 0.5 mA Focussing Voltage

Vertical Deflection Plates

0 – 400 V, 1mA

Velocity Filter Magnet

Model G-1: 9.5 V, 3 A, Model G-2: 28 V, 14 A Continuous operation

Velocity Filter Deflection Plates

0 – 350 V, 50 mA (Floating outputs)

Model

G-1, G-1-D, G-2, G-2-D

Schematics

Optional Equipment

Custom flanges and ports. Custom flanges and additional ports may be ordered with the BIS Ion Gun Systems. Contact Beam Imaging for a quote.

Model 400 Beam Decelerator and Model 450 Beam Decelerator. :BIS recommends the beam decelerator (model 400) for ion energies less than 500 eV. The model G-1-D and model G-2-D include the standard model G-1 and G-2 respectively with optional model 400 or model 450 decelerator and model 400-A adaptor flange (model 400 only).

Ion Gun Control Units:BIS offers control units (E-series) for the above Ion Gun Systems. The control units include all power supplies needed to operate the Ion Gun as well as a cooling unit for the ion source. Vacuum gauge controls are also included.

Beam Observation Systems:The optional Beam Viewing Systems (BOS) make it a snap to tune up the spatial profile of the ion beam. The systems are an invaluable aid in the initial startup of the ion gun.