Product Overview
Beam Imaging Solutions has developed a new compact Retarding Field Energy Analyzer (RFEA) that is now available for purchase. The new Model RFEA-1 is of a collimated entrance aperture design with 3 grids. One grid will be for sweeping a retarding voltage and the other two grids for electron suppression before and after the sweeping grid. The RFEA-1 mounts to a standard 2.75” conflat flange and will have similar outer dimensions like our model BOS-18 Beam Observation System. The vacuum housing is 2″ (5.1cm) long and has 4 MHV feedthroughs for the collector and three grids. This new instrument can be used to measure the mean energy and energy spread of the incoming ion beam with beam energies up to 5keV.
The exploded view of the RFEA-1 is shown at left. Two entrance apertures with 3mm diameter holes are spaced 16.7mm apart. These apertures reduce the energy spread error introduced by ions entering the analyzer at an angle off the main beam axis. The first and third grid are used to suppress electrons from entering the analyzer and the from secondary electron emission from the collector. The middle grid (second grid) is used for applying a sweeping voltage to retard the incoming beam. The collector is connected to an electrometer to measure the ion beam current. By measuring the ion beam current versus sweep voltage, one can deduce the beam energy spread and mean energy.